STAGE DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE

Details for Australian Patent Application No. 2002239072 (hide)

Owner NIKON CORPORATION

Inventors KONDO, Makoto

Pub. Number AU-A-2002239072

PCT Pub. Number WO2002/080185

Priority 2001-092235 28.03.01 JP

Filing date 26 March 2002

Wipo publication date 15 October 2002

International Classifications

G12B 005/00 Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01B 011/00 Measuring arrangements characterised by the use of optical means

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002239072

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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