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Details for Australian Patent Application No. 2002239054 (hide)

Owner KABUSHIKI KAISHA WATANABE SHOKO SUGINO, Takashi

Inventors SUGINO, Takashi; UMEDA, Masaru; KUSUHARA, Masaki

Pub. Number AU-A-2002239054

PCT Pub. Number WO2002/080260

Priority 2001-203688 04.07.01 JP; 2001-94037 28.03.01 JP

Filing date 25 March 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/318 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002239054

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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