METHOD OF PROCESSING A SURFACE OF A WORKPIECE

Details for Australian Patent Application No. 2002239027 (hide)

Owner EBARA CORPORATION

Inventors SAMUKAWA, Seiji; ICHIKI, Katsunori; YAMAUCHI, Kazuo; HIYAMA, Hirokuni

Pub. Number AU-A-2002239027

PCT Pub. Number WO2002/078044

Priority 2001-88888 26.03.01 JP

Filing date 22 March 2002

Wipo publication date 8 October 2002

International Classifications

H01J 037/08 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Ion sources

H01J 027/02 Ion beam tubes - Ion sources

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002239027

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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