BEAM PROCESSING APPARATUS

Details for Australian Patent Application No. 2002239025 (hide)

Owner EBARA CORPORATION

Inventors SAMUKAWA, Seiji; ICHIKI, Katsunori; YAMAUCHI, Kazuo; HIYAMA, Hirokuni

Pub. Number AU-A-2002239025

PCT Pub. Number WO2002/078043

Priority 2001-088863 26.03.01 JP

Filing date 22 March 2002

Wipo publication date 8 October 2002

International Classifications

H01J 037/08 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Ion sources

H01J 037/30 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron-beam or ion-beam tubes for localised treatment of objects

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002239025

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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