METHOD AND DEVICE FOR EXPOSURE, AND METHOD OF MANUFACTURING DEVICE

Details for Australian Patent Application No. 2002238959 (hide)

Owner NIKON CORPORATION

Inventors OKUMURA, Masahiko; TAZAWA, Hisashi

Pub. Number AU-A-2002238959

PCT Pub. Number WO2002/075795

Priority 2001-79531 19.03.01 JP

Filing date 19 March 2002

Wipo publication date 3 October 2002

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03B 007/20 Details common to cameras - in accordance with change of lens

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002238959

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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