ELECTRIC HEATER FOR THERMAL TREATMENT FURNACE

Details for Australian Patent Application No. 2002238956 (hide)

Owner KOYO THERMO SYSTEMS CO., LTD.

Inventors AITANI, Takashi; UEMORI, Susumu

Pub. Number AU-A-2002238956

PCT Pub. Number WO2003/078910

Filing date 19 March 2002

Wipo publication date 29 September 2003

International Classifications

F27D 011/02 Arrangement of elements for electric heating in or on furnaces

H05B 003/62 Ohmic-resistance heating - Heating elements specially adapted for furnaces

H01L 021/22 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2002238956

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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