PLASMA DEVICE

Details for Australian Patent Application No. 2002238951 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors ISHII, Nobuo

Pub. Number AU-A-2002238951

PCT Pub. Number WO2003/079740

Filing date 18 March 2002

Wipo publication date 29 September 2003

International Classifications

H05H 001/46 Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/505 Chemical deposition or plating by decomposition

Event Publications

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2002238951

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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