SEMICONDUCTOR PRODUCTION SYSTEM, CLUSTER TOOL, CONTROL METHOD OF SEMICONDUCTOR PRODUCTION SYSTEM AND MAINTENANCE METHOD OF CLUSTER TOOL

Details for Australian Patent Application No. 2002238938 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors ISHII, Tomoyuki; NUMAKURA, Masahiro

Pub. Number AU-A-2002238938

PCT Pub. Number WO2002/078065

Priority 2001-83148 22.03.01 JP

Filing date 18 March 2002

Wipo publication date 8 October 2002

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002238938

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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