METHOD FOR MEASURING ELEMENTS IN A SUBSTRATE FOR OPTICS, ELECTRONICS OR OPTOELECTRONICS

Details for Australian Patent Application No. 2002238623 (hide)

Owner S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES

Inventors VIRAVAUX, Laurent

Pub. Number AU-A-2002238623

PCT Pub. Number WO2002/065097

Priority 01/01926 13.02.01 FR

Filing date 12 February 2002

Wipo publication date 28 August 2002

International Classifications

G01N 001/40 Sampling - Concentrating samples

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C01B 033/107 Silicon

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002238623

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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