CRITICAL DIMENSION MONITORING FROM LATENT IMAGE

Details for Australian Patent Application No. 2002238013 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors SINGH, Bhanwar; TEMPLETON, Michael, K.; RANGARAJAN, Bharath; SUBRAMANIAN, Ramkumar

Pub. Number AU-A-2002238013

PCT Pub. Number WO2003/003123

Priority 09/893,807 28.06.01 US

Filing date 31 January 2002

Wipo publication date 3 March 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002238013

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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