SCANNING DEPOSITION HEAD FOR DEPOSITING PARTICLES ON A WAFER

Details for Australian Patent Application No. 2002237871 (hide)

Owner MSP CORPORATION

Inventors SUN, James, J.; LIU, Benjamin, Y., H.

Pub. Number AU-A-2002237871

PCT Pub. Number WO2002/061172

Priority 09/772,694 30.01.01 US

Filing date 18 January 2002

Wipo publication date 12 August 2002

International Classifications

C23C 020/00 Chemical coating by decomposition of either solid compounds or suspensions of the coating forming compounds, without leaving reaction products of surface material in the coating

B05B 013/02 Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups - Means for supporting work

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 007/00 Single-crystal growth from liquids

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002237871

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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