Radiation-sensitive composition changing in refractive index and utilization thereof

Details for Australian Patent Application No. 2002237556 (hide)

Owner JSR Corporation

Inventors Bessho, Nobuo; Yamada, Kenji; Kumano, Atsushi; Nishimura, Isao

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2002237556

PCT Pub. Number WO2002/072705

Priority 2001-70151 13.03.01 JP

Filing date 8 March 2002

Wipo publication date 24 September 2002

Acceptance publication date 3 May 2007

International Classifications

G03F 7/075 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Silicon-containing compounds

G02B 1/04 (2006.01) Optical elements characterised by the material of which they are made - made of organic materials, e.g. plastics

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

G03F 7/004 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Photosensitive materials

G03F 7/039 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-B-2002237556

3 May 2007 Application Accepted

  Published as AU-B-2002237556

30 August 2007 Standard Patent Sealed

11 October 2007 Section 223 Application Received

  JSR Corporation An application to extend the time from 03 Dec 2005 to 03 Sep 2007 in which to file search results has been filed . Address for service in Australia - Phillips Ormonde & Fitzpatrick Level 22 367 Collins Street Melbourne VIC 3000

6 December 2007 Section 223 Application Allowed

  JSR Corporation The time in which to file search results has been extended to 03 Sep 2007. Address for service in Australia - Phillips Ormonde & Fitzpatrick Level 22 367 Collins Street Melbourne VIC 3000

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