METHOD FOR OXIDATION OF A SILICON SUBSTRATE

Details for Australian Patent Application No. 2002237202 (hide)

Owner NANOS APS

Inventors PEDERSEN, Kjeld; TAEKKER, Lars-Bo; JENSEN, Thomas; K.DAM, Flemming; HOFFMANN, Soren, V.; MORGEN, Per

Pub. Number AU-A-2002237202

PCT Pub. Number WO2002/073678

Priority PA 2001 00408 10.03.01 DK

Filing date 7 March 2002

Wipo publication date 24 September 2002

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002237202

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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