DEPOSITION PROCESS

Details for Australian Patent Application No. 2002237106 (hide)

Owner COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH O RGANISATION

Inventors BENDAVID, Avi; KINDER, Terence, John; PRESTON, Edward; MARTIN, Phil, J.

Pub. Number AU-A-2002237106

PCT Pub. Number WO2002/070776

Priority PR 3536 05.03.01 AU

Filing date 5 March 2002

Wipo publication date 19 September 2002

International Classifications

C23C 016/50 Chemical deposition or plating by decomposition - using electric discharges

C23C 014/30 Coating by vacuum evaporation, by sputtering or by ion implantation

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

C23C 016/503 Chemical deposition or plating by decomposition

C23C 016/511 Chemical deposition or plating by decomposition

C23C 016/513 Chemical deposition or plating by decomposition

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002237106

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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