DIELECTRIC FILMS FOR NARROW GAP-FILL APPLICATIONS

Details for Australian Patent Application No. 2002236809 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors LEUNG, Roger; HACKER, Nigel; XIE, Songyuan; DENG, Yanpei; ENDISCH, Denis

Pub. Number AU-A-2002236809

PCT Pub. Number WO2003/063225

Filing date 18 January 2002

Wipo publication date 2 September 2003

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2002236809

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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