ABRASIVE FREE POLISHING IN COPPER DAMASCENE APPLICATIONS

Details for Australian Patent Application No. 2002236749 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors DYER, Timothy, S.; CHADDA, Saket; SCHULTZ, Stephen, C.

Pub. Number AU-A-2002236749

PCT Pub. Number WO2002/057052

Priority 09/766,332 19.01.01 US

Filing date 10 January 2002

Wipo publication date 30 July 2002

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002236749

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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