ADDITION OF POWER AT SELECTED HARMONICS OF PLASMA PROCESSOR DRIVE FREQUENCY

Details for Australian Patent Application No. 2002236598 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MITROVIC, Andrej, S.; JEVTIC, Jovan; PARSONS, Richard; SIRKIS, Murray, D.

Pub. Number AU-A-2002236598

PCT Pub. Number WO2002/054835

Priority 60/259,861 08.01.01 US

Filing date 17 December 2001

Wipo publication date 16 July 2002

International Classifications

H05H 001/46 Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002236598

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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