LIQUID DISTRIBUTION UNIT FOR DIVIDING A LIQUID CURRENT INTO A PLURALITY OF PARTIAL CURRENTS

Details for Australian Patent Application No. 2002235825 (hide)

Owner TECHNISCHE UNIVERSITAT BRAUNSCHWEIG

Inventors STADEL, Oliver; SCHMIDT, Jurgen; KRAUSE, Ulrich

Pub. Number AU-A-2002235825

PCT Pub. Number WO2002/055757

Priority 101 00 670.5 09.01.01 DE

Filing date 8 January 2002

Wipo publication date 24 July 2002

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002235825

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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