A CHEMICAL VAPOR DEPOSITION PROCESS AND APPARATUS THEREOF

Details for Australian Patent Application No. 2002235020 (hide)

Owner PRECISION DIAMOND CO., LTD.

Inventors CHAE, Ki-Woong

Pub. Number AU-A-2002235020

PCT Pub. Number WO2002/068709

Priority 2001/9598 26.02.01 KR

Filing date 26 February 2002

Wipo publication date 12 September 2002

International Classifications

C23C 016/27 Chemical deposition or plating by decomposition

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002235020

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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