LIGHT SOURCE DEVICE, LIGHT ILLUMINATING DEVICE AND EXPOSURE DEVICE, AND DEVICE PRODUCING METHOD

Details for Australian Patent Application No. 2002234949 (hide)

Owner NIKON CORPORATION

Inventors KAWAI, Hitoshi; KITANO, Hiroshi

Pub. Number AU-A-2002234949

PCT Pub. Number WO2002/071143

Priority 2001-058970 02.03.01 JP; 2001-248655 20.08.01 JP

Filing date 4 March 2002

Wipo publication date 19 September 2002

International Classifications

G02F 001/37 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002234949

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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