METHOD AND DEVICE FOR SEPARATING A SEMICONDUCTOR WAFER FROM A CARRIER

Details for Australian Patent Application No. 2002234637 (hide)

Owner MUFFLER, Pirmin, Gerhard

Inventors MUFFLER, Pirmin, Gerhard

Pub. Number AU-A-2002234637

PCT Pub. Number WO2002/067295

Priority 101 08 369.6 21.02.01 DE

Filing date 20 February 2002

Wipo publication date 4 September 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B28D 005/00 Fine working of gems, jewels, crystals, e.g. of semiconductor material

Event Publications

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2002234637

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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