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Details for Australian Patent Application No. 2002234616 (hide)

Owner MEISSNER, Dieter

Inventors MEISSNER, Dieter

Pub. Number AU-A-2002234616

PCT Pub. Number WO2002/056346

Priority 101 01 375.2 13.01.01 DE

Filing date 14 January 2002

Wipo publication date 24 July 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002234616

17 July 2003 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  Application withdrawn under section 141(3)/See Reg. 8.3(2). Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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