A METHOD OF FORMING RESIST PATTERNS IN A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR WASHING LIQUID USED IN SAID METHOD

Details for Australian Patent Application No. 2002233764 (hide)

Owner HYON, Man-Sok

Inventors HYON, Man-Sok

Pub. Number AU-A-2002233764

PCT Pub. Number WO2002/067304

Priority 2001/8876 22.02.01 KR

Filing date 7 February 2002

Wipo publication date 4 September 2002

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2002233764

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002233765-ASPHALT HEATING METHOD AND APPARATUS OF MANUFACTURE EQUIPMENT FOR ASPHALT MORTAR USING THE WASTED HEAT

2002233763-BUSINESS MODEL ON THE PLANNING AND PRODUCTION OF MUSICAL PERFORMANCE VIA THE INTERNET