POLYGON REFLECTOR, AND ILLUMINATION OPTICAL SYSTEM AND SEMICONDUCTOR EXPOSURE DEVICE USING THE POLYGON REFLECTOR
Details for Australian Patent Application No. 2002233700 (hide)
International Classifications
Event Publications
27 February 2003 Application Open to Public Inspection
Published as AU-A-2002233700
12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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