POLYGON REFLECTOR, AND ILLUMINATION OPTICAL SYSTEM AND SEMICONDUCTOR EXPOSURE DEVICE USING THE POLYGON REFLECTOR

Details for Australian Patent Application No. 2002233700 (hide)

Owner NIKON CORPORATION

Inventors TAKINO, Hideo

Pub. Number AU-A-2002233700

PCT Pub. Number WO2002/067021

Priority 2001-47679 23.02.01 JP; 2001-47680 23.02.01 JP

Filing date 22 February 2002

Wipo publication date 4 September 2002

International Classifications

G02B 005/08 Optical elements other than lenses - Mirrors

H01L 021/30 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G02B 007/182 Mountings, adjusting means, or light-tight connections, for optical elements - for mirrors

Event Publications

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2002233700

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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