METHOD FOR DEPOSITING ESPECIALLY CRYSTALLINE LAYERS

Details for Australian Patent Application No. 2002233224 (hide)

Owner AIXTRON AG

Inventors DAUELSBERG, Martin

Pub. Number AU-A-2002233224

PCT Pub. Number WO2002/052069

Priority 100 64 942.4 23.12.00 DE

Filing date 1 December 2001

Wipo publication date 8 July 2002

International Classifications

C30B 025/14 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Feed and outlet means for the gases

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002233224

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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