METHOD AND APPARATUS FOR MONITORING A SEMICONDUCTOR WAFER DURING A SPIN DRYING OPERATION

Details for Australian Patent Application No. 2002232884 (hide)

Owner LAM RESEARCH CORPORATION

Inventors TREUR, Randolph, E.

Pub. Number AU-A-2002232884

PCT Pub. Number WO2002/052637

Priority 09/752,614 27.12.00 US

Filing date 21 December 2001

Wipo publication date 8 July 2002

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002232884

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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