SYSTEM AND METHOD FOR UTILIZATION OF WASTE HEAT OF SEMICONDUCTOR EQUIPMENT AND HEAT EXCHANGER USED FOR UTILIZATION OF WASTE HEAT OF SEMICONDUCTOR EQUIPMENT

Details for Australian Patent Application No. 2002232211 (hide)

Owner TOKYO ELECTRON LIMITED TAISEI CORPORATION

Inventors SUENAGA, Osamu; KOBAYASHI, Sadao

Pub. Number AU-A-2002232211

PCT Pub. Number WO2002/067308

Priority 2001-044217 20.02.01 JP

Filing date 15 February 2002

Wipo publication date 4 September 2002

International Classifications

F28D 007/16 Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2002232211

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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