LIGHT SOURCE DEVICE AND LIGHT IRRADIATING DEVICE AND PRODUCTION METHOD FOR DEVICE

Details for Australian Patent Application No. 2002232191 (hide)

Owner NIKON CORPORATION

Inventors DOI, Masaaki

Pub. Number AU-A-2002232191

PCT Pub. Number WO2002/065597

Priority 2001-036256 14.02.01 JP

Filing date 14 February 2002

Wipo publication date 28 August 2002

International Classifications

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

G02F 001/37 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

G02F 001/11 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002232191

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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