METHODS OF PREPARING ORGANOMETALLIC COMPOUNDS AND NOVEL ORGANOMETALLIC DIMERS

Details for Australian Patent Application No. 2002231959 (hide)

Owner THE UNIVERSITY COURT OF THE UNIVERSITY OF DUNDEE

Inventors THOMSON, James

Pub. Number AU-A-2002231959

PCT Pub. Number WO2002/065526

Priority 0103495.8 13.02.01 GB

Filing date 11 February 2002

Wipo publication date 28 August 2002

International Classifications

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/14 Chemical deposition or plating by decomposition

C23C 016/18 Chemical deposition or plating by decomposition - from metallo-organic compounds

C01G 055/00 Compounds of ruthenium, rhodium, palladium, osmium, iridium, or platinum

C01D 003/02 Halides of sodium, potassium, or alkali metals in general

C07F 009/50 Compounds containing elements of the 5th Group of the Periodic System

C07F 015/00 Compounds containing elements of the 8th Group of the Periodic System

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002231959

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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