TRIPLE ELECTRODE MOEMS TUNABLE FILTER AND FABRICATION PROCESS THEREFOR

Details for Australian Patent Application No. 2002231134 (hide)

Owner AXSUN TECHNOLOGIES, INC.

Inventors ATIA, Walid, A.; NAGLE, Steven, F.; MILLER, Michael, F.

Pub. Number AU-A-2002231134

PCT Pub. Number WO2002/052329

Priority 09/748,625 22.12.00 US

Filing date 19 December 2001

Wipo publication date 8 July 2002

International Classifications

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

G02B 007/188 Mountings, adjusting means, or light-tight connections, for optical elements

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002231134

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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