SPACER ETCH MASK FOR SONOS TYPE NONVOLATILE MEMORY

Details for Australian Patent Application No. 2002230969 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors RAMSBEY, Mark, T.; DERHACOBIAN, Narbeh; WANG, Janet; HUI, Angela; PHAM, Tuan; SUNKAVALLI, Ravi; RANDOLPH, Mark

Pub. Number AU-A-2002230969

PCT Pub. Number WO2003/001601

Priority 09/885,490 20.06.01 US

Filing date 14 December 2001

Wipo publication date 8 January 2003

International Classifications

H01L 027/115 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - Electrically programmable read-only memories

H01L 021/8246 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002230969

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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