SPATTER DEVICE AND SPATTER FILM FORMING METHOD

Details for Australian Patent Application No. 2002230162 (hide)

Owner ASAHI GLASS COMPANY, LIMITED

Inventors ANDO, Eiichi; YAMADA, Tomohiro; MASHIMO, Takahiro; SHIDOJI, Eiji

Pub. Number AU-A-2002230162

PCT Pub. Number WO2002/063064

Priority 2001-383069 17.12.01 JP; 2001-031004 07.02.01 JP; 2001-220942 23.07.01 JP

Filing date 6 February 2002

Wipo publication date 19 August 2002

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

G02B 005/28 Optical elements other than lenses - Interference filters

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002230162

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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