ENHANCED SACRIFICIAL LAYER ETCHING TECHNIQUE FOR MICROSTRUCTURE RELEASE

Details for Australian Patent Application No. 2002230030 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors DRECHSLER, Ute; GENOLET, Gregoire; VETTIGER, Peter; DESPONT, Michel

Pub. Number AU-A-2002230030

PCT Pub. Number WO2002/064495

Priority 01810141.0 12.02.01 EP

Filing date 8 February 2002

Wipo publication date 28 August 2002

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002230030

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002230031-Selective oxidation of kraft cooking liquors

2002230029-DOUBLE LUMEN NEEDLE