METHODS FOR FORMING LATERAL TRENCH OPTICAL DETECTORS

Details for Australian Patent Application No. 2002229983 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors YANG, Min; RIM, Kern

Pub. Number AU-A-2002229983

PCT Pub. Number WO2002/067339

Priority 09/784,963 16.02.01 US

Filing date 13 February 2002

Wipo publication date 4 September 2002

International Classifications

H01L 031/103 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

H01L 027/144 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - Devices controlled by radiation

H01L 031/0352 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

H01L 031/105 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

Event Publications

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2002229983

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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