MANUFACTURING INTEGRATED CIRCUITS

Details for Australian Patent Application No. 2002229132 (hide)

Owner NUMERICAL TECHNOLOGIES, INC.

Inventors WEED, J., Tracy; PIERRAT, Christophe; PATI, Yagyensh, (Buno); SHARAN, Atul

Pub. Number AU-A-2002229132

PCT Pub. Number WO2002/052344

Priority 09/752,809 27.12.00 US

Filing date 26 December 2001

Wipo publication date 8 July 2002

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002229132

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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