SEMICONDUCTOR TILING STRUCTURE AND METHOD OF FORMATION

Details for Australian Patent Application No. 2002229106 (hide)

Owner MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventors CHHEDA, Sejal, N.; TRAVIS, Edward, O.

Pub. Number AU-A-2002229106

PCT Pub. Number WO2002/058133

Priority 09/761,885 17.01.01 US

Filing date 18 December 2001

Wipo publication date 30 July 2002

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002229106

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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