ENCHANCED BRIGHT PEAK CLEAR PHASE SHIFTING MASK AND METHOD OF USE

Details for Australian Patent Application No. 2002229066 (hide)

Owner WISCONSIN ALUMNI RESEARCH FOUNDATION (WARF)

Inventors YANG, Lei; TAYLOR, James, W.; CERRINA, Francesco

Pub. Number AU-A-2002229066

PCT Pub. Number WO2002/075456

Priority 09/813,343 20.03.01 US

Filing date 29 October 2001

Wipo publication date 3 October 2002

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G21K 005/00 Irradiation devices

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002229066

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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