SEMICONDUCTOR STRUCTURES AND DEVICES UTILIZING A STABLE TEMPLATE

Details for Australian Patent Application No. 2002229034 (hide)

Owner MOTOROLA, INC.

Inventors OVERGAARD, Corey; YU, Zhiyi; DROOPAD, Ravindranath

Pub. Number AU-A-2002229034

PCT Pub. Number WO2002/082513

Priority 09/824,388 02.04.01 US

Filing date 10 December 2001

Wipo publication date 21 October 2002

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 025/18 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - characterised by the substrate

C30B 029/52 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

C30B 025/02 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Epitaxial-layer growth

Event Publications

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002229034

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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