HYBRID LOW-k INTERCONNECT STRUCTURE COMPRISED OF 2 SPIN-ON DIELECTRIC MATERIALS

Details for Australian Patent Application No. 2002228977 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors PURUSHOTHAMAN, Sampath; TYBERG, Christy, Sensenich; GATES, Stephen, McConnell; HEDRICK, Jeffrey, Curtis; NITTA, Satyanarayana, V.

Pub. Number AU-A-2002228977

PCT Pub. Number WO2002/071468

Priority 09/795,429 28.02.01 US

Filing date 10 December 2001

Wipo publication date 19 September 2002

International Classifications

H01L 021/4763 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/48 Details of semiconductor or other solid state devices - Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads or terminal arrangements

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002228977

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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