STRUCTURE AND METHOD FOR FABRICATING SEMICONDUCTOR STRUCTURES ON COMPLIANT SUBSTRATES

Details for Australian Patent Application No. 2002228923 (hide)

Owner MOTOROLA, INC.

Inventors IRWIN, James, S.; JOHNSON, Timothy, J.

Pub. Number AU-A-2002228923

PCT Pub. Number WO2002/099867

Priority 09/870,830 01.06.01 US

Filing date 6 December 2001

Wipo publication date 16 December 2002

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 025/18 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - characterised by the substrate

Event Publications

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002228923

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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