Film forming method and film forming device

Details for Australian Patent Application No. 2002228436 (hide)

Owner Sumitomo Electric Industries, Ltd.

Inventors Ohmatsu, Kazuya; Hahakura, Shuji

Agent Davies Collison Cave

Pub. Number AU-B-2002228436

PCT Pub. Number WO2002/063063

Priority 2001-32280 08.02.01 JP

Filing date 5 February 2002

Wipo publication date 19 August 2002

Acceptance publication date 24 May 2007

International Classifications

C23C 14/28 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by wave energy or particle radiation

C23C 14/08 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

C23C 14/50 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

H01B 13/00 (2006.01) Apparatus or processes specially adapted for manufacturing conductors or cables

H01L 21/203 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 14/22 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the process of coating

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-B-2002228436

24 May 2007 Application Accepted

  Published as AU-B-2002228436

20 September 2007 Standard Patent Sealed

30 August 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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