SYSTEM FOR ENHANGINC APPAR- ATUS PRODUCTIVITY AND METHOD THEREOF

Details for Australian Patent Application No. 2002228335 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors KARASAWA, Wataru

Pub. Number AU-A-2002228335

PCT Pub. Number WO2002/057860

Priority 2001-013571 22.01.01 JP

Filing date 22 January 2002

Wipo publication date 30 July 2002

International Classifications

G05B 023/02 Testing or monitoring of control systems or parts thereof - Electric testing or monitoring

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002228335

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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