VERTICALLY TRANSLATABLE CHUCK ASSEMBLY AND METHOD FOR A PLASMA REACTOR SYSTEM

Details for Australian Patent Application No. 2002227418 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors JEVTIC, Jovan; JOHNSON, Wayne, L.; FINK, Steven, T.; BROWNING, Jeff

Pub. Number AU-A-2002227418

PCT Pub. Number WO2002/059933

Priority 60/262,642 22.01.01 US

Filing date 20 December 2001

Wipo publication date 6 August 2002

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002227418

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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