VARIABLE SURFACE HOT PLATE FOR IMPROVED BAKE UNIFORMITY OF SUBSTRATES

Details for Australian Patent Application No. 2002227391 (hide)

Owner DUPONT PHOTOMASKS, INC.

Inventors WEBSTER, Michael, D.

Pub. Number AU-A-2002227391

PCT Pub. Number WO2002/054455

Priority 60/259,403 28.12.00 US

Filing date 11 December 2001

Wipo publication date 16 July 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/40 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Treatment after imagewise removal, e.g. baking

G03F 007/38 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Treatment before imagewise removal, e.g. prebaking

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002227391

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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