ELECTRODE FOR PLASMA PROCESSES AND METHOD FOR MANUFACTURE AND USE THEREOF

Details for Australian Patent Application No. 2002227016 (hide)

Owner LAM RESEARCH CORPORATION

Inventors BENZING, David; HUBACEK, Jerome, S.; ELLINGBOE, Albert, R.

Pub. Number AU-A-2002227016

PCT Pub. Number WO2002/054444

Priority 09/749,916 29.12.00 US

Filing date 7 December 2001

Wipo publication date 16 July 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002227016

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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