APPARATUS FOR FABRICATING SEMICONDUCTOR STRUCTURES

Details for Australian Patent Application No. 2002226993 (hide)

Owner MOTOROLA, INC.

Inventors DROOPAD, Ravindranath; YU, Zhiyi; OOMS, William, J.; RAMDANI, Jamal

Pub. Number AU-A-2002226993

PCT Pub. Number WO2002/064852

Priority 09/780,119 09.02.01 US

Filing date 27 November 2001

Wipo publication date 28 August 2002

International Classifications

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C30B 023/02 Single-crystal growth from vapours - Epitaxial-layer growth

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002226993

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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