METHOD TO MEASURE FEATURES WITH ASYMMETRICAL PROFILE

Details for Australian Patent Application No. 2002226949 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors RANGARAJAN, Bharath; SUBRAMANIAN, Ramkumar; SINGH, Bhanwar; TEMPLETON, Michael, K.

Pub. Number AU-A-2002226949

PCT Pub. Number WO2002/077570

Priority 09/817,820 26.03.01 US

Filing date 13 November 2001

Wipo publication date 8 October 2002

International Classifications

G01B 011/30 Measuring arrangements characterised by the use of optical means - for measuring roughness or irregularity of surfaces

G01N 021/21 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Polarisation-affecting properties

G01N 021/47 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Scattering, i.e. diffuse reflection

G01N 021/95 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01B 011/24 Measuring arrangements characterised by the use of optical means - for measuring contours or curvatures

G01B 011/26 Measuring arrangements characterised by the use of optical means - for measuring angles or tapers

H01L 021/26 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002226949

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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