CARBONITRIDE COATED COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING THEREOF

Details for Australian Patent Application No. 2002226896 (hide)

Owner LAM RESEARCH CORPORATION

Inventors O'DONNELL, Robert, J.; CHANG, Christopher, C.; DAUGHERTY, John, E.

Pub. Number AU-A-2002226896

PCT Pub. Number WO2002/053794

Priority 09/750,251 29.12.00 US

Filing date 21 November 2001

Wipo publication date 16 July 2002

International Classifications

C23C 014/06 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/46 Chemical deposition or plating by decomposition - characterised by the method used for heating the substrate

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

B01J 019/02 Chemical, physical, or physico-chemical processes in general - Apparatus characterised by being constructed of material selected for its chemically-resistant properties

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002226896

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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