PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Details for Australian Patent Application No. 2002225432 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors HIGUCHI, Kimihiro

Pub. Number AU-A-2002225432

PCT Pub. Number WO2002/059954

Priority 2001-17015 25.01.01 JP

Filing date 18 January 2002

Wipo publication date 6 August 2002

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002225432

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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