DRESSING APPARATUS AND POLISHING APPARATUS

Details for Australian Patent Application No. 2002225419 (hide)

Owner EBARA CORPORATION

Inventors TOGAWA, Tetsuji; NOJI, Ikutaro; KOJIMA, Shunichiro; TAKADA, Nobuyuki

Pub. Number AU-A-2002225419

PCT Pub. Number WO2002/057051

Priority 2001-11730 19.01.01 JP

Filing date 17 January 2002

Wipo publication date 30 July 2002

International Classifications

B24B 037/00 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped

B24B 053/02 Devices or means for dressing or conditioning abrasive surfaces

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002225419

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002225420-PATH SEARCH METHOD AND PATH SEARCH DEVICE, AND MOBILE TERMINAL

2002225418-NOVEL G PROTEIN-COUPLED RECEPTOR PROTEIN AND DNA THEREOF